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Sol-Gel Coatings on Acoustic Wave Devices: Thin Film Characterization and Chemical Sensor Development

Published online by Cambridge University Press:  28 February 2011

Gregory C. Frye ,
C. Jeffrey Brinker ,
Antonio J. Ricco ,
Stephen J. Martin ,
Janice Hilliard  and
Daniel H. Doughty
Gregory C. Frye
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
C. Jeffrey Brinker
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
Antonio J. Ricco
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
Stephen J. Martin
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
Janice Hilliard
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
Daniel H. Doughty
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
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Abstract

We have investigated the use of porous oxide coatings, formed using sol-gel chemistry routes, as the discriminating elements of acoustic wave (AW) chemical sensors. These coatings provide several unique advantages: durability, high adsorption capacity based on large surface areas, and chemical selectivity based on both controlled pore size and acid/base, ion exchange or chelation chemistry. The porosity of these coatings is determined by performing nitrogen adsorption isotherms using the AW device response to mass changes to monitor the uptake of nitrogen at 77 K. These studies demonstrate how sol-gel chemistry and film deposition can be combined to tailor the microstructure of thin oxide coatings. The chemical sensitivity and selectivity obtained with this class of coatings will be demonstrated using several examples: hydrous titanate ion exchange coatings, zeolite/silicate microcomposite coatings, and surface-modified silicate films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 180: Symposium A – Better Ceramics Through Chemistry IV , 1990 , 583
Copyright
Copyright © Materials Research Society 1990

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References

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