Skip to main content Accessibility help
×
Home
Hostname: page-component-564cf476b6-z65vl Total loading time: 0.201 Render date: 2021-06-20T05:09:32.476Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": true, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true }

Role of SrTiO3 Seed Layer on Low-temperature Crystallization of Pb(Zr, Ti)O3 Films Prepared by Metalorganic Chemical Vapor Deposition

Published online by Cambridge University Press:  01 February 2011

Ji-Won Moon
Affiliation:
jwmoon@sim.ceram.titech.ac.jp, Tokyo Institute of Technology, Department of Metallurgy and Ceramics Science, 2-12-1 O-Okayama, Meguro-ku, Tokyo, 152-8552, Japan, +81-3-5734-2518, +81-3-5734-3369
Naoki Wakiya
Affiliation:
tnwakiy@ipc.shizuoka.ac.jp, Shizuoka University, Department of Materials and Chemical Engineering, 3-5-1 Johoku, Hamamatsu, Shizuoka, 432-8561, Japan
Takanori Kiguchi
Affiliation:
tkiguchi@imr.tohoku.ac.jp, Tohoku University, Institute for Materials Research, 2-1-1 Katahira, Aoba-ku, Sendai, 980-8577, Japan
Tomohiko Yoshioka
Affiliation:
tyoshioka@ceram.titech.ac.jp, Tokyo Institute of Technology, Department of Metallurgy and Ceramics Science, 2-12-1 O-Okayama, Meguro-ku, Tokyo, 152-8552, Japan
Tanaka Junzo
Affiliation:
Junzo.Tanaka@ceram.titech.ac.jp, Tokyo Institute of Technology, Department of Metallurgy and Ceramics Science, 2-12-1 O-Okayama, Meguro-ku, Tokyo, 152-8552, Japan
Kazuo Shinozaki
Affiliation:
ksino@ceram.titech.ac.jp, Tokyo Institute of Technology, Department of Metallurgy and Ceramics Science, 2-12-1 O-Okyama, Meguro-ku, Tokyo, 152-8552, Japan
Get access

Abstract

Role of SrTiO3 seed layer on low-temperature crystallization of Pb(Zr, Ti)O3 (PZT) film was investigated. The SrTiO3 seeds were prepared by pulsed laser deposition (PLD) with the temperature range of 400-600 °C and PZT films were prepared by thermal MOCVD. The pyrochlore free PZT films can be successfully crystallized at around 340 °C on SrTiO3 seed layers by thermal MOCVD. It was found that the role of SrTiO3 seed layer is not only pyrochlore suppression but also perovskite promotion. It is also considered that crystallinity, surface coverage and seed layer thickness are important parameters for low-temperature crystallization and electrical properties of PZT films.

Type
Research Article
Copyright
Copyright © Materials Research Society 2008

Access options

Get access to the full version of this content by using one of the access options below.

References

1. Kim, K., Integrated Ferroelectrics 2001, 36, 21.10.1080/10584580108015525CrossRefGoogle Scholar
2. Piekarski, B., Dubey, M., Zakar, E., Polcawich, R., DeVoe, D., and Wickenden, D., Integrated Ferroelectrics 2002, 42, 25.CrossRefGoogle Scholar
3. Aratani, M., Nagashima, K., H., and Funakubo, , Jpn. J. Appl. Phys. 2001 40, 4126.10.1143/JJAP.40.4126CrossRefGoogle Scholar
4. Huang, Z., Zhang, Q., and Whatmore, R. W., J. Appl. Phys. 1999, 85, 7355.10.1063/1.369362CrossRefGoogle Scholar
5. Kwok, C. K. and Desu, S. B., J. Mater. Res. 1993, 8, 339.10.1557/JMR.1993.0339CrossRefGoogle Scholar
6. Moon, J.-W., Tazawa, S., Shinozaki, K., Wakiya, N., and Mizutani, N., Appl. Phys. Lett. 2006, 89, 202907.10.1063/1.2390671CrossRefGoogle Scholar
7. Moon, J. W., Tazawa, S., Wakiya, N., Kiguchi, T., Ishida, Y., Mizutani, N., and Shinozaki, K., Solid State Phenomena 2007, 124–126, 153.10.4028/www.scientific.net/SSP.124-126.153CrossRefGoogle Scholar
8. Tagantsev, A. K., and Gerra, G., J. Appl. Phys. 2006, 100, 051607.10.1063/1.2337009CrossRefGoogle Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Role of SrTiO3 Seed Layer on Low-temperature Crystallization of Pb(Zr, Ti)O3 Films Prepared by Metalorganic Chemical Vapor Deposition
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Role of SrTiO3 Seed Layer on Low-temperature Crystallization of Pb(Zr, Ti)O3 Films Prepared by Metalorganic Chemical Vapor Deposition
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Role of SrTiO3 Seed Layer on Low-temperature Crystallization of Pb(Zr, Ti)O3 Films Prepared by Metalorganic Chemical Vapor Deposition
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *