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RF Discharge Modeling Through Solutions to the Moments of the Boltzmann Transport Equations
Published online by Cambridge University Press: 21 February 2011
Abstract
Simulation of if discharges through numerical solutions to the Moments of the Boltzmann Transport Equations (MBTE) is discussed. Continuity and momentum equations for the electrons and ions, and electron energy equation have been solved using an efficient finite difference scheme. Results for a 13.56 MHz argon discharge are presented.
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- Research Article
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- Copyright © Materials Research Society 1991
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