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Reparation and Characterization of BST Thin Films with Hybrid Bottom Electrodes

Published online by Cambridge University Press:  10 February 2011

Joon-Hyung Ahn
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusong-dong, Yusong-gu, Taejon, 305-701, Korea
Jeong-Ho Park
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusong-dong, Yusong-gu, Taejon, 305-701, Korea
Won-Jae Lee
Affiliation:
Semiconductor Technology Division, Electronics and Telecommunications Research Institute, 161 Kajong-dong, Yusong-gu, Taejon, 305-350, Korea
Ho-Gi Kim
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusong-dong, Yusong-gu, Taejon, 305-701, Korea
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Abstract

Thin platinum layer was used for the modification of the interface state between (Ba,Sr)TiO3 (BST) thin films and RuO2 bottom electrodes. Pt/RuO2 hybrid bottom electrodes were fabricated with various platinum deposition temperatures by a conventional dc magnetron sputtering method. Although the surface morphology and XRD patterns of BST thin films were not changed, the electrical properties of BST films deposited on Pt/RuO2 hybrid electrodes were improved compared to the films on RuO2 electrodes. Dielectric constant (εr) and leakage current density of BST thin films on Pt/RuO2 hybrid electrodes prepared at the platinum deposition temperature of 400°C were 498 and 8.6 × 10−8 A/cm2 at 1.5V, respectively.

Type
Research Article
Copyright
Copyright © Materials Research Society 1998

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