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Removal of Surface Carbon Impurities from Ultra-Low Loss Fluoride Glasses

Published online by Cambridge University Press:  25 February 2011

J. S. Sanghera
Affiliation:
Geo-Centers Inc., 10903 Indian Head. Highway, Ft. Washington, MD 20744
P. C. Pureza
Affiliation:
Naval Research Laboratory, 4555 Overlook Avenue, Washington, DC 20375
I. D. Aggarwal
Affiliation:
Naval Research Laboratory, 4555 Overlook Avenue, Washington, DC 20375
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Abstract

This paper describes a novel route for removal of surface carbon from heavy-metal fluoride glasses melted in vitreous carbon crucibles. The technique utilizes dry etching with active fluorine produced in a NF3 plasma generated in a microwave cavity.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

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References

1. Drexhage, M. G., in Treatise on Materials Science and Technology, Vol. 26, Glass IV, edited by Tomozawa, M. and Doremus, R. H. (Academic Press, Inc., New York, 1985) p. 151243 Google Scholar
2. Aggarwal, I. D., Sanghera, J. S., Harbison, B. B., Busse, L. and Pureza, P., Mat. Sci. Forum 67 & 68, 443452 (1991)CrossRefGoogle Scholar
3. Sanghera, J. S., Harbison, B. B. and Aggarwal, I. D., J. NonCryst. Solids 140, 146149 (1992)CrossRefGoogle Scholar
4. Klein, P. H., Pureza, P. C., Roberts, W. I. and Aggarwal, I. D., Mat. Sci. Forum 32–33, 571576 (1988)Google Scholar
5. Ball, M. C. and Norbury, A. H., Physical Data for Inorganic Chemists (Longman Publishers, London, 1974) p. 70 Google Scholar

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Removal of Surface Carbon Impurities from Ultra-Low Loss Fluoride Glasses
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