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Relationship Between Stress and Surface Roughness in Krypton Implanted MgO

Published online by Cambridge University Press:  21 February 2011

Laurence Gea
Affiliation:
Departement de Physique des Materiaux (URA CNRS 172), Universite Claude Bernard, LYON-I (France),
Jean-Luc Loubet
Affiliation:
Ecole Centrale de Lyon (URA CNRS 855), Ecully (France)
Roger Brenier
Affiliation:
Departement de Physique des Materiaux (URA CNRS 172), Universite Claude Bernard, LYON-I (France),
Paul Thevenard
Affiliation:
Departement de Physique des Materiaux (URA CNRS 172), Universite Claude Bernard, LYON-I (France),
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Abstract

(001) MgO single crystals were implanted with 150 keV krypton ions (Kr+) at a fluence of 5.1016 ions.cm-2 . The implanted surface, observed with an Atomic Force Microscope (AFM) exhibits striking features that can be described as undulations with a wavelength of 0.5 [μm. We correlate these features to the decrease in density and the stresses induced by the implantation damage. As a matter of fact, a model of surface instabilities provides a relationship between the wavelength of the ondulations and internal stresses. Using this model, implantation stresses are calculated to 2.2 GPa. This is in good agreement with the value of 2 GPa obtained with the help of the microindentation technique and the literature data. Some effects of an ionizing post-irradiation on stress and surface roughness are described.

Type
Research Article
Copyright
Copyright © Materials Research Society 1995

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References

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Relationship Between Stress and Surface Roughness in Krypton Implanted MgO
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