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Preparation of Optically Smooth Surfaces of High TcSuperconducting Films

Published online by Cambridge University Press:  16 February 2011

J. H. kim ,
A. Kapitulnik ,
J. S. Harris Jr ,
K. Char ,
I. Bozovic  and
W. Y. Lee
J. H. kim
Affiliation:
Stanford University, Stanford, CA 94305
A. Kapitulnik
Affiliation:
Stanford University, Stanford, CA 94305
J. S. Harris Jr
Affiliation:
Stanford University, Stanford, CA 94305
K. Char
Affiliation:
Conductus Inc., Sunnyvale, CA 94086
I. Bozovic
Affiliation:
Varian Research Center, Palo Alto, CA 94303
W. Y. Lee
Affiliation:
IBM Almaden Research Center
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Abstract

We report optical studies of predominantly c-axis oriented high-Tc superconducting films before and after ion milling. A significant increase in midinfrared reflectivity resulted from ion milling of a few thousand Å Features associated with α-axis texture vanished after ion milling, resulting in pure c-axis films. This suggests that α-axis grains reside mostly near the surface in post-annealed high-Tc superconducting films. Therefore, even after annealing (for the purpose of raising Tc), highly oriented c-axis films can be retained by ion milling. This may be important for device applications where optically smooth surfaces and interfaces are to be routinely prepared.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 223: Symposium E – Low Energy Ion Beam and Plasma Modification of Materials , 1991 , 159
Copyright
Copyright © Materials Research Society 1991

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References

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