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Polyurethane Nanofiber Webs for Sensor and Actuator Applications in Microelectromechanical Systems (MEMS)

Published online by Cambridge University Press:  01 February 2011

Mustafa M. Demir
Affiliation:
Sabanci University Faculty of Engineering and Natural Sciences Orhanli-Tuzla, 34956, Istanbul/Turkey
Mansoor Naseer
Affiliation:
Sabanci University Faculty of Engineering and Natural Sciences Orhanli-Tuzla, 34956, Istanbul/Turkey
Thomas F. Bechteler
Affiliation:
Sabanci University Faculty of Engineering and Natural Sciences Orhanli-Tuzla, 34956, Istanbul/Turkey
Yasar Gurbuz
Affiliation:
Sabanci University Faculty of Engineering and Natural Sciences Orhanli-Tuzla, 34956, Istanbul/Turkey
Yusuf Z. Menceloglu
Affiliation:
Sabanci University Faculty of Engineering and Natural Sciences Orhanli-Tuzla, 34956, Istanbul/Turkey
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Abstract

Sensor application of Polyurethane Nanofiber Webs (PNW) has been explored in this study. PNW were prepared by electrospinning of the polyurethane solution in dimethylformamide. Silver nanoparticles with a size of 60 nm on PNW were produced by precipitation of AgNO3 in alkaline media. A micromachined capacitive pressure sensor has been designed using a special elastic and conducting thin membrane (PNW) as an active electrode sensing the pressure. With an additional inductor and a metal-semiconductor field effect transistor (MESFET), a microwave oscillator has also been designed as part of the system. The capacity variation due to changing pressure results in a frequency shift of this oscillator. This frequency shift is measured and corresponds to the pressure. The simulations performed on this structure show a very good linearity over a wide range of applied pressure which could be detected by change in oscillator frequency. These results indicate that an implementation of PNW as an active material in capacitative sensing applications of MicroElectroMechanical Systems (MEMS) could be feasible.

Type
Research Article
Copyright
Copyright © Materials Research Society 2004

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References

[1] Schreuder-Gibson, H.L., Truong, Q., Walker, J.E., Owens, J.R., Wander, J.D., Jones, E.W. Jr, MRS Bulletin, 28 (8), 574578 (2003).CrossRefGoogle Scholar
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Polyurethane Nanofiber Webs for Sensor and Actuator Applications in Microelectromechanical Systems (MEMS)
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