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Photochemical Dry Etching of Semiconductors and its Relationship to Semiconductor Electronic Properties

Published online by Cambridge University Press:  28 February 2011

Carol I. H. Ashby
Carol I. H. Ashby*
Affiliation:
Sandia National Laboratories, Division 1126, P. O. Box 5800, Albuquerque, NM 87185
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Abstract

The general utility and selectivity of photochemical dry etching processes which require direct participation of photogenerated carriers is largely determined by the electronic properties of the semiconductor. The laser which is used to produce the carriers responsible for etching can also provide in situ measurement of some of the important electronic properties which influence the etching process.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 75: Symposium B – Photon, Beam, and Plasma Stimulated Chemical Processes at Surfaces , 1986 , 369
Copyright
Copyright © Materials Research Society 1987

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References

1. Ashby, C. I. H., “Laser-Induced Etching”, in Physics of Thin Films, Vol.13, Francombe, M. H. and Vossen, J. L., eds., Academic Press, Orlando, Florida, 1987.Google Scholar
2. Ashby, C. I. H., Appl. Phys. Lett. 45, 892 (1984).Google Scholar
3. Ashby, C. I. H. and Biefeld, R. M., Appl. Phys. Lett. 47, 62 (1985).Google Scholar
4. Houle, F., Chem Phys. Lett. 95, 5 (1983).Google Scholar
5. Reksten, G. M., Holber, W., and Osgood, R. M. Jr., Appl. Phys. Lett. 48, 551 (1986).Google Scholar
6. Tietjen, J. J. and Amick, J. A., J. Electrochem. Soc. 113, 724 (1966).Google Scholar
7. Weakliem, H. A. and Redfield, D., J. Appl. Phys. 50, 1491 (1979).Google Scholar
8. Lum, R. M., Glass, A. M., Ostermayer, F. W. Jr., Kohl, P. A., Ballman, A. A., and Logan, R. A., J. Appl. Phys. 57, 39 (1985).Google Scholar
9. Ashby, C. I. H., Appl. Phys. Lett. 46, 752 (1985).Google Scholar
10. Seraphin, B. O., Phys. Rev. A 140, 1716 (1965).Google Scholar