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Oxidation Studies of Silicon Oxynitride Using X-Ray Photoelectron Spectroscopy and Transmission Electron Microscopy
Published online by Cambridge University Press: 10 February 2011
Abstract
Silicon oxynitride (Si2N2O) ceramics were oxidized in 1 atm dry oxygen at 11 00IC and 13000C. The oxidized samples were studied using x-ray photoelectron spectroscopy and crosssectional transmission electron microscopy in conjunction with energy dispersive x-ray analysis. TEM characterization revealed the chemical abruptness of the SiO2 and Si2N2O interface. Further investigation indicated the inclusions of residual SiO2 in Si2N2O, which contributed to the broad XPS elemental distribution in the oxide-substrate interface region.
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