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Nucleation and Growth Processes During the Chemical Vapor Deposition of Diamond

Published online by Cambridge University Press:  15 February 2011

Yaxin Wang ,
Edward A. Evans ,
Christopher S. Kovach ,
Uziel Landau  and
John C. Angus
Yaxin Wang
Affiliation:
Chemical Engineering Dept., Case Western Reserve University, Cleveland, OH 44106–7217
Edward A. Evans
Affiliation:
Chemical Engineering Dept., Case Western Reserve University, Cleveland, OH 44106–7217
Christopher S. Kovach
Affiliation:
Chemical Engineering Dept., Case Western Reserve University, Cleveland, OH 44106–7217
Uziel Landau
Affiliation:
Chemical Engineering Dept., Case Western Reserve University, Cleveland, OH 44106–7217
John C. Angus
Affiliation:
Chemical Engineering Dept., Case Western Reserve University, Cleveland, OH 44106–7217
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Abstract

In situ microbalance measurements of diamond growth rates are described. These results can be used to test proposed mechanisms for diamond growth and suggest mechanisms for sp2 impurity incorporation. The Thiele modulus is a simple criterion for growth uniformity and is used to compare hot-filament and combustion-assisted growth.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 363 , 1994 , 127
Copyright
Copyright © Materials Research Society 1995

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