Skip to main content Accessibility help
×
Home
Hostname: page-component-65dc7cd545-x46dj Total loading time: 0.377 Render date: 2021-07-25T01:18:17.428Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": true, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true, "newUsageEvents": true }

Nanoindentation of Microspring Thin Films

Published online by Cambridge University Press:  17 March 2011

Mary W. Seto
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta Edmonton, Alberta T6G 2G7, Canada
Brian Dick
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta Edmonton, Alberta T6G 2G7, Canada
Michael J. Brett
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta Edmonton, Alberta T6G 2G7, Canada
Get access

Abstract

Porous thin films with helical microstructures were fabricated with the Glancing Angle Deposition technique. These films consisted of arrays of “microsprings” whose geometries could be engineered with nanometer scale control. Some of the mechanical properties of these helically structured films were studied with a nanoindentation technique. Several microscopic “springbed” films were tested over a range of forces using a spherical indenter tip. The geometries of the microsprings were varied, and a number of different materials were used to fabricate these films, which were typically a few micrometers thick. Slanted post arrays, resembling micro-cantilevers, were also subjected to nanoindentation tests. Results of initial experiments, theory, and simulations show that these microstructures behave in a manner analogous to macroscopic springs and cantilevers, and may offer some insight into how materials behave at the microscale.

Type
Research Article
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below.

References

1. Robbie, K., Friedrich, L. J., Dew, S. K., Smy, T., and Brett, M. J., J. Vac. Sci. Technol. A 13, 1032 (1995).CrossRefGoogle Scholar
2. Lakhtakia, A., Messier, R., Brett, M. J., and Robbie, K., Innovations in Materials Research 1, 165 (1996).Google Scholar
3. Sit, J. C., Vick, D., Robbie, K., and Brett, M. J., J. Mater. Res. 14, 1197 (1999).CrossRefGoogle Scholar
4. Vick, D., Tsui, Y. Y., Brett, M. J., and Fedosejevs, R., Thin Solid Films 350, 49 (1999).CrossRefGoogle Scholar
5. Robbie, K., and Brett, M. J., J. Vac. Sci. Technol. A 15, 1460 (1997).CrossRefGoogle Scholar
6. Seto, M. W., Robbie, K., Vick, D., Brett, M. J., and Kuhn, L., J. Vac. Sci. Technol. B 17, 2171 (1999).CrossRefGoogle Scholar
7. Roark, R., Roark's Formulas for Stress and Strain, 6th ed. (McGraw-Hill, New York, 1989), p. 386.Google Scholar
8. Liu, F., Umlor, M. T., Shen, L., Weston, J., Eads, W., Barnard, J. A., and Mankey, G. J., J. App. Physics 85, 5486 (1999).CrossRefGoogle Scholar
9. Malac, M., Egerton, R. F., Brett, M. J., and Dick, B., J. Vac. Sci. Technol. B 17, 2671 (1999).CrossRefGoogle Scholar
10. Dick, B., Brett, M. J., Smy, T. J., Freeman, M. R., Malac, M., and Egerton, R. F., J. Vac. Sci. Technol. A 18, 1838 (2000).CrossRefGoogle Scholar
11. Kreith, F., The CRC Handbook of Mechanical Engineering, (CRC Press Inc, Boca Raton, 1998), p. 183.CrossRefGoogle Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Nanoindentation of Microspring Thin Films
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Nanoindentation of Microspring Thin Films
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Nanoindentation of Microspring Thin Films
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *