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Morphology of Vapor Evaporated Mo Thin Films
Published online by Cambridge University Press: 16 February 2011
Abstract
Studies were made of the dependence of the morphology of Mo films, prepared by ebeam evaporation in an UHV system, on the substrate temperature and deposition angle. The main characterization techniques used were large angle x-ray scattering and cross-sectional high resolution electron microscopy.
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- Copyright © Materials Research Society 1991
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