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Morphology of E-Beam Evaporated Cr Thin Films

Published online by Cambridge University Press:  21 February 2011

Y. Cheng ,
M. B. Stearns  and
David J. Smith
Y. Cheng
Affiliation:
Physics Department, Arizona State University, Tempe, AZ 85287
M. B. Stearns
Affiliation:
Physics Department, Arizona State University, Tempe, AZ 85287
David J. Smith
Affiliation:
Also at Center for Solid State Science.
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Abstract

Studies were made of the structural dependence on the growth rate and substrate temperature of Cr thin films prepared by e-beam evaporation. The d-spacings and the average size of the crystallites were determined from large angle x-ray scattering spectra. Detailed studies of the morphology were made by cross-sectional high resolution transmission electron microscopy.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 187: Symposium J – Thin Film Structures and Phase Stability , 1990 , 151
Copyright
Copyright © Materials Research Society 1990

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References

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4. Cheng, Y. (unpublished).Google Scholar
5. Scow, K.B. and Thun, R.E., in Transactions of the Ninth National Vacuum Symposium of the American Vacuum Society, edited by Bancroft, George H.,(The Macmillan Company, New York, and Collier - Macmillan LTD., London, 1962), p. 151.Google Scholar