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A Model for Estimating the Stress Induced During Oxidation of Sharp Silicon Structures

Published online by Cambridge University Press:  15 February 2011

C.J. Morgan  and
C.J. Humphreys
C.J. Morgan
Affiliation:
Department of Materials Science and Metallurgy, Pembroke St., Cambridge, CB2 3QZ, U.K.
C.J. Humphreys
Affiliation:
Department of Materials Science and Metallurgy, Pembroke St., Cambridge, CB2 3QZ, U.K.
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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 389: Symposium R – Modedling and Simulation of Thin-Film Processing , 1995 , 191
Copyright
Copyright © Materials Research Society 1995

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References

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