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The Mechanical Reliability of Sputter-Coated Indium Tin Oxide Polyester Substrates for Flexible Display and Touchscreen Applications

Published online by Cambridge University Press:  21 March 2011

Darran R. Cairns ,
David C. Paine  and
Gregory P. Crawford
Darran R. Cairns
Affiliation:
Brown University, Division of Engineering, Providence, RI 02912, U.S.A
David C. Paine
Affiliation:
Brown University, Division of Engineering, Providence, RI 02912, U.S.A
Gregory P. Crawford
Affiliation:
Brown University, Division of Engineering, Providence, RI 02912, U.S.A
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Abstract

Indium tin oxide (ITO) films deposited on polyester substrates are a key material in the development of two exciting technologies, touchscreens and flexible liquid crystal displays. The new generation “plastic” displays and touchscreens must be flexible and robust, have excellent optical properties, and be inexpensive. We report on the mechanical and electrical reliability of ITO on a polyethylene terephthalate substrate (PET). We show that the mechanical behavior of the ITO film is dominated by the properties of the substrate and that the deformation of the substrate is mapped by the crack patterns in the ITO. This is most strongly evidenced in the simulated wear of a touchscreen where failure after >50000 pen strokes is primarily due to cracking of the ITO as a result of increased substrate deformation over time. In addition the mechanical reliability of the ITO layer is dependent on the film thickness. Cracking was observed in a 105 nm thick ITO film at a strain of 0.022 and for a 16.8 nm thick film at 0.003. The thickness and hence sheet resistance of the film effectively limits the maximum allowable deformation of the substrate and must be considered in the design of suitable display and touchscreen devices. In addition we report on the change in resistance with time-at- temperature and relate this to the shrinkage of the substrate.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 666: Symposium F – Transport and Microstructural Phenomena , 2001 , F3.24
Copyright
Copyright © Materials Research Society 2001

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References

REFERENCES

1. May, P., Society of Information Display '96 Digest,192 (1996).Google Scholar
2. Kim, J.-H., Vorflusev, V. and Kumar, S., SID '99 Digest, 880 (1999).Google Scholar
3. West, J. L., Rouberol, M., Franci, J. J., Li, Y., Doane, J. W. and Pfeiffer, M., Asia Display '95, 55 (1995).Google Scholar
4. West, J. L., Bodnar, V. H., Kim, Y. and Wonderly, H., IDW'99, 335 (1999).Google Scholar
5. Kalkhoran, N. M., Vernon, S. M., Trivedi, D. A., Halverson, W. D., Pathangey, B., Davidson, M. and Holloway, P., SID '97 Digest, 623 (1997).Google Scholar
6. Drzaic, P., Comiskey, B., Albert, J. D., Zhang, L., Loxley, A., Feeney, R. and Jacobson, J., SID '98 Digest, 1131 (1998).Google Scholar
7. Chiulli, C., DelPico, J., Vetterling, W., Johnson, K. M., Sharp, G. D., Schadt, M. and Seiberle, H., SID '99 Digest, 1054 (1999).Google Scholar
8. Watanabe, M., Inoue, Y. and Fukuchi, S., International Display Workshop '99, 253 (1999).Google Scholar
9. Suo, Z., Ma, E. Y., Gleskova, H. and Wagner, S., Applied Physics Letters, 74, 1177 (1999).Google Scholar
10. Lewis, B. G. and Paine, D. C., MRS Bulletin, 25, 22 (2000).Google Scholar
11. Wang, J. S., Sugimura, Y., Evans, A. G. and Tredway, W. K., Thin Solid Films, 325, 163 (1998).Google Scholar
12. Letterier, Y., Boogh, L., Andersons, J. and Manson, J.-A. E., J. Polym. Sci. B: Polym. Phys. 35, 1449 (1997).Google Scholar
13. Letterier, Y., Andersons, J., Pitton, Y. and Manson, J.-A.E., J. Polym. Sci. B: Polym. Phys. 35, 1463 (1997).Google Scholar
14. Yanaka, M., Kato, Y., Tsukahara, Y. and Takeda, N., Thin Solid Films 355–356, 337 (1999).Google Scholar
15. Cairns, D. R., Witte, R. P. II, Sparacin, D. K., Sachsman, S. M., Paine, D. C., Crawford, G. P. and Newton, R. R., Appl. Phys. Lett., 76, 1425 (2000).Google Scholar