Hostname: page-component-77c89778f8-m8s7h Total loading time: 0 Render date: 2024-07-20T18:02:23.170Z Has data issue: false hasContentIssue false
  • English
  • Français

Mechanical Properties and Residual Stresses in Oxide/Metal Multilayer Films Synthesized by Ion Beam Assisted Deposition

Published online by Cambridge University Press:  15 February 2011

C. E. Kalnas ,
L. J. Parfitt ,
M. G. Goldiner ,
G. S. Was  and
J. W. Jones
C. E. Kalnas
Affiliation:
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI.
L. J. Parfitt
Affiliation:
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI.
M. G. Goldiner
Affiliation:
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI.
G. S. Was
Affiliation:
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI.
J. W. Jones
Affiliation:
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI.
Get access

Abstract

Films of Al, Al2O3 and Al/Al2O3 microlaminates were formed by ion beam assisted deposition (IBAD) at R ratios from 0.0025 to 0.5 and film thicknesses between 150 and 2600 nm. Oxide films were amorphous while metal layers were crystalline with small grains and texture for both PVD and IBAD conditions. The average stress in the oxide film is tensile at R=0 and becomes compressive, saturating at approximately 15 eV/atom. The residual stress in the Al films is tensile over all R ratios and the stress in the microlaminate roughly follows a rule of mixtures. Deformation of ductile substrates on which films had been deposited revealed that the critical strain to fracture was strongly dependent on residual stress. Large compressive stresses in monolithic films produced by ion beam assisted deposition delayed the onset of crack initiation while the presence of multiple layers, in general, lowered the crack density at saturation, suggesting a possible ductilizing effect.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 308: Symposium M1 – Thin Films: Stresses and Mechanical Properties IV , 1993 , 695
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Alpas, A.T. et al. , "The mechanical properties of laminated microscale composites of Al/Al2O3," J. Mater. Sci., 25 (1990), 1603.CrossRefGoogle Scholar
2 Tench, D. and White, J., Met. Trans., 15A (1984), 2039.CrossRefGoogle Scholar
3 Chou, T. C. et al. , "Mechanical properties and microstructure of metal/ceramic microlaminates: Part I. Nb/MoSi2 systems.,"J. Mater. Res. 7, (10) (1992), 2765.CrossRefGoogle Scholar
4 Chou, T. C. et al. , "Mechanical properties and microstructures of metal/ceramic microlaminates: Part II. A M0/Al2O3 system.,"J. Mater. Res.,7, (10) (1992), 2774.CrossRefGoogle Scholar
5 Bhattacharya, R. S., Rai, A. K. and Mendiratta, M. G., Intermetallic Matrix Composites. eds. Anton, D. L., Martin, P. L., Miracle, D. B. and McMeeking, R., (Mat. Res. Soc. Proc, Pittsburgh, PA 1990), 71.Google Scholar
6 Hardwick, D. A. and Cordi, R. C., in Intermetallic Matrix Composites, eds. Anton, D. L., Martin, P. L., Miracle, D. B. and McMeeking, R., (Mat. Res. Soc. Proc, Pittsburgh, PA 1990), 65.Google Scholar
7 Bannister, M. and Ashby, M.F., Acta Metall. 39 (1991), 2575.CrossRefGoogle Scholar
8 Cao, H. C., Thouless, M. D. and Evans, A. G., Acta Metall., 36 (1988), 2037.CrossRefGoogle Scholar
9 Hu, M. S. and Evans, A. G., "The cracking and decohesion of thin films on ductile substrates," Acta Metall., 37 (1989), 917.CrossRefGoogle Scholar
10 Dalgleish, B. J., Lu, M. C. and Evans, A. G., Acta Metall., 36 (1988), 2029.CrossRefGoogle Scholar
11 Lu, T. C. et al. , Acta Metall., 39, (1991), 1853 .CrossRefGoogle Scholar
12 Smidt, F. A., "Use of ion beam assisted deposition to modify the microstructure and properties of thin films," Inter. Mater. Rev., 35 (1990), 61.CrossRefGoogle Scholar
13 Dolitüe, L. R., Nucl. Instr. Meth. B9 (1985), 334.Google Scholar
14 Thornton, J. A., Tabock, J. and Hoffman, D. W., Thin Solid Films. 64 (1979), 111.CrossRefGoogle Scholar
15 Was, G. S. et al. , Proc. Int. Conf. on Beam Processing of Advanced Materials. TMS, Warrendale, PA, 1992 (in press).Google Scholar
17 Müller, K-H., J. Appl. Phvs., 62 (1987), 1796.CrossRefGoogle Scholar
18 Mashayekhi, A. et al. , Intermetallic Matrix Composites II. eds. Miracle, D., Graves, J. and Anton, D., (Mater. Res. Soc. Proc, Pittsburgh, PA 1992) in press.Google Scholar
19 Park, H-W. and Danyluk, S., Advanced Electronic Packaging Materials, eds. Barfknecht, A. T., Partridge, J. P., Chen, C. J. and Li, Che-Yu, (Mater. Res. Soc. Proc, Pittsburgh, PA 1990) Vol. 167,365.Google Scholar
20 Swanson, S. R., J. of Engineering Materials and Technology. 111 (1989), 145.CrossRefGoogle Scholar
21 Agrawal, D. C. and Raj, R., Acta Metall., 37 (1989), 1265.CrossRefGoogle Scholar
22 Agrawal, D. C. and Raj, R., Mat. Sci. Engr., A126 (1990), 125.CrossRefGoogle Scholar