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Liquid Source Mocvd of High Quality Yba2Cu3O7−x Films on Polycrystalline And Amorphous Substrates

Published online by Cambridge University Press:  10 February 2011

D.B. Studebaker ,
G. Doubinina ,
J. Zhang ,
Y.Y. Wang ,
V.P. Dravid  and
T.J. Marks
D.B. Studebaker
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Dr., Danbury, CT 06810 Department of Chemistry and the Science and Technology Center for Superconductivity, Northwestern University, Evanston, IL 60208-3113
G. Doubinina
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Dr., Danbury, CT 06810
J. Zhang
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Dr., Danbury, CT 06810 Current address: Motorola Inc., MRST, 3501 Ed Bluestein Blvd., MD-K10 Austin, TX 78721
Y.Y. Wang
Affiliation:
Department of Material Science and Engineering and the Science and Technology Center for Superconductivity, Northwestern University, Evanston, IL 60208-3113
V.P. Dravid
Affiliation:
Department of Material Science and Engineering and the Science and Technology Center for Superconductivity, Northwestern University, Evanston, IL 60208-3113
T.J. Marks
Affiliation:
Department of Chemistry and the Science and Technology Center for Superconductivity, Northwestern University, Evanston, IL 60208-3113
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Abstract

High temperature superconducting Yba2Cu3O7−x films were grown by liquid delivery metal-organic chemical vapor deposition (LDMOCVD) on silver-coated stainless steel substrates. The films are c-axis oriented, and exhibit a very low surface resistance of 110 μΩ at 77 K and 3 GHz. A two-step LDMOCVD method for growth of oriented (200) CeO2 films on amorphous substrates was also developed. Films of CeO2 for YBCO buffer layers were grown on fused silica (SiO2), polycrystalline alumina (Al2O3), and sapphire (A12O3). A highly c-axis oriented film of YBCO was grown on a fused silica substrate with a CeO2 buffer layer.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 415: Symposium BB – Metal-Organic Chemical Vapor Deposition of Electronic Ceramics II , 1995 , 255
Copyright
Copyright © Materials Research Society 1996

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References

REFERENCES

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