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Large Area Flexible Amorphous Silicon Position Sensitive Detectors

Published online by Cambridge University Press:  17 March 2011

Elvira M.C. Fortunato
Affiliation:
Rodrigo F.P. Martins Materials Science Department / CENIMAT, Faculty of Sciences and Technology of New University of Lisbon and CEMOP-UNINOVA, Quinta da Torre, 2825-114 Caparica, Portugal
Donatello Brida
Affiliation:
Rodrigo F.P. Martins Materials Science Department / CENIMAT, Faculty of Sciences and Technology of New University of Lisbon and CEMOP-UNINOVA, Quinta da Torre, 2825-114 Caparica, Portugal
Isabel M.M. Ferreira
Affiliation:
Rodrigo F.P. Martins Materials Science Department / CENIMAT, Faculty of Sciences and Technology of New University of Lisbon and CEMOP-UNINOVA, Quinta da Torre, 2825-114 Caparica, Portugal
H. M.B. Åguas
Affiliation:
Rodrigo F.P. Martins Materials Science Department / CENIMAT, Faculty of Sciences and Technology of New University of Lisbon and CEMOP-UNINOVA, Quinta da Torre, 2825-114 Caparica, Portugal
Patrícia Nunes
Affiliation:
Rodrigo F.P. Martins Materials Science Department / CENIMAT, Faculty of Sciences and Technology of New University of Lisbon and CEMOP-UNINOVA, Quinta da Torre, 2825-114 Caparica, Portugal
Ana Cabrita
Affiliation:
Rodrigo F.P. Martins Materials Science Department / CENIMAT, Faculty of Sciences and Technology of New University of Lisbon and CEMOP-UNINOVA, Quinta da Torre, 2825-114 Caparica, Portugal
Franco Giuliani
Affiliation:
Rodrigo F.P. Martins Materials Science Department / CENIMAT, Faculty of Sciences and Technology of New University of Lisbon and CEMOP-UNINOVA, Quinta da Torre, 2825-114 Caparica, Portugal
Yuri Nunes
Affiliation:
Physics Department / CEFITEC, Faculty of Sciences and Technology of New University of Lisbon and CEMOP-UNINOVA, Quinta da Torre, 2825-114 Caparica, Portugal
Manuel J.P. Maneira
Affiliation:
Physics Department / CEFITEC, Faculty of Sciences and Technology of New University of Lisbon and CEMOP-UNINOVA, Quinta da Torre, 2825-114 Caparica, Portugal
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Abstract

Large area thin film position sensitive detectors based on amorphous silicon technology have been prepared on polyimide substrates using the conventional plasma enhanced chemical vapour deposition technique. The sensors have been characterised by spectral response, illuminated I-V characteristics and position detectability measurements. The obtained one dimensional position sensors with 5 mm wide and 60 mm long present a maximum spectral response at 600 nm, an open circuit voltage of 0.6 V and a position detectability with a correlation of 0.9989 associated to a standard deviation of 1×10−2, comparable to those ones produced on glass substrates. The surface of the sensors at each stage of fabrication was investigated by Atomic Force Microscopy.

Type
Research Article
Copyright
Copyright © Materials Research Society 2000

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References

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