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Kinetics of Reactions Relevant to the Chemical Vapor Deposition of Indium Compounds
Published online by Cambridge University Press: 10 February 2011
Abstract
The kinetics of trimethylindium pyrolysis are investigated in a flow reactor equipped with a molecular-beam mass-spectrometric sampling system. Data are analyzed using a new computational approach that accounts for heat and mass transport in the reactor. The measured activation energy, 46.2 kcal mol−1, is in good agreement with previously reported values.
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- Copyright © Materials Research Society 1998
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