Skip to main content Accessibility help
×
Home
Hostname: page-component-56f9d74cfd-mgjtl Total loading time: 0.248 Render date: 2022-06-28T07:48:44.036Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "useRatesEcommerce": false, "useNewApi": true }

Investigation of PZT//LSCO/IPT//Aerogel Thin Film Composites for Uncooled Pyroelectric Ir Detectors

Published online by Cambridge University Press:  10 February 2011

P.G. Clem
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
B.A. Tuttle
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
J.A. Ruffner
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
C.J. Brinker
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
R.W. Schwartz
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
M. Rodriguez
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
W.L. Warren
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
Get access

Abstract

A monolithic thin film structure for uncooled pyroelectric infrared detector arrays was developed to integrate thermally isolated Pb(Zr,Ti)O3-based thin films on silicon, with a low thermal conductivity, aerogel thin film interlayer. Aerogel thin films of 0.4-1.2μm thickness and 70-85% porosity were deposited on silicon substrates by dip coating to form a thermal isolation layer. 200-400nm thick Pb(Zr0.4Ti0.6)O3 films deposited on (La,Sr)CoO3[LSCO]//Pt electrodes atop these aerogel films displayed a remanent polarization Pr = 28μ C/cm2, pyroelectric coefficient p = 30 nC/cm2K, and calculated noise equivalent temperature difference NETD = 0.07°C. Processing of Pb(Zr,Ti)O3 thin films atop the aerogel interlayer structure required modifications to deposition and heat treatment methods to minimize tensile stress accumulation. Effects of thermal processing and thin film stress state on ferroelectric properties are also reported.

Type
Research Article
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Kulwicki, B.M., Amin, A., Beratan, H.R., and Hanson, C.H., “Pyroelectric Imaging,” Proc. 8th IEEE ISAF, pp. 111 (1992).Google Scholar
2. Kruse, P. W., “Uncooled Infrared Focal Plane Arrays,” Proc. 9th IEEE ISAF, pp. 643646 (1994).Google Scholar
3. Shorrocks, N.M., Patel, A., Beanland, R., and Stringfellow, S.B., “Integration of Pyroelectric Films with CMOS Circuits for IR Imaging,” presented at ISIF 1997, Santa Fe, NM.Google Scholar
4. Cole, B.E. et al. , “High Performance Infrared Detector Arrays using Thin Film Microstructures,” Proc. 9th IEEE ISAF, pp. 653656 (1994).Google Scholar
5. Bell, A. et al. , “PbTiO3 Thin Films for Pyroelectric Detection,” Proc. 9th IEEE ISAF, pp. 643646 (1994).Google Scholar
6. Scheuerpflug, P., Hauck, M., and Fricke, J., “Thermal Properties of Silica Aerogels Between 1.4 and 330K,” J. Non-Cryst. Solids, 145, 196 (1992).CrossRefGoogle Scholar
7. Brinker, C.J. and Scherer, G.W., Sol-gel Science, Academic Press, New York (1990).Google Scholar
8. Prakash, S.S., Brinker, C.J., Hurd, A. J., and Rao, S.M., “Ambient Pressure Silica Aerogel Films,” in Advances in Porous Materials, edited by Komarneni, S., Smith, D.M., and Beck, J.S., Mater. Res. Soc. Symp. Proc. 371, 205209 (1995).Google Scholar
9. Schwartz, R.W., Assink, R.A., and Headley, T.J., “Spectroscopic and Microstructural Characterization of Solution Chemistry Effects in PZT Thin Film Processing,” in Ferroelectric Thin Films II, edited by Tuttle, B.A., Desu, S.B., Ramesh, R., and Shiosaki, T., Mater. Res. Soc. Symp. Proc. 361, 377387 (1995).Google Scholar
10. Holmes, A.S. et al. , “Fabrication of buried channel waveguides on silicon substrates using spin-on glass”, Applied Optics 32(25), 4916 (1993).CrossRefGoogle ScholarPubMed
11. Tuttle, B.A., Voight, J.A., Goodnow, D.D., Lamppa, D.L., Headley, T.J., Eatough, M.O., Zender, G., Nasby, R.D., and Rodgers, S.M., “Highly Oriented, Chemically Prepared Pb(Zr,Ti)O3 Thin Films,” J. Am. Ceram. Soc. 76(6), 1537 (1989).CrossRefGoogle Scholar

Save article to Kindle

To save this article to your Kindle, first ensure coreplatform@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Investigation of PZT//LSCO/IPT//Aerogel Thin Film Composites for Uncooled Pyroelectric Ir Detectors
Available formats
×

Save article to Dropbox

To save this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Dropbox account. Find out more about saving content to Dropbox.

Investigation of PZT//LSCO/IPT//Aerogel Thin Film Composites for Uncooled Pyroelectric Ir Detectors
Available formats
×

Save article to Google Drive

To save this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Google Drive account. Find out more about saving content to Google Drive.

Investigation of PZT//LSCO/IPT//Aerogel Thin Film Composites for Uncooled Pyroelectric Ir Detectors
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *