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Hybrid Tomography of Nanostructures in the Electron Microscope

Published online by Cambridge University Press:  31 January 2011

Zineb Saghi
Affiliation:
z.saghi@shef.ac.uk, University of Sheffield, eng Materials, sheffield, United Kingdom
Thirunavukkarasu Gnanavel
Affiliation:
t.gnanavel@shef.ac.uk, university of sheffield, eng materials, sheffield, United Kingdom
xiaojing xu
Affiliation:
xiaojingxu.cheng@gmail.com, University of Sheffield, eng Materials, sheffield, United Kingdom
Guenter Möbus
Affiliation:
g.moebus@shef.ac.uk, University of Sheffield, eng Materials, sheffield, United Kingdom
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Abstract

A variety of tomographic experiments and modes for electron tomography of nanostructures are introduced, derived from the general concepts of quantitative computed tomography, binarised geometric tomography, including shape-from-silhouette, and spectroscopic chemical mapping. Our emphasis is on working out concepts of combining at least two of these tomography modes in order to share their respective advantages and improve the overall reconstruction quality. In this work, the following three hybrid modes are presented: (i) ADF-STEM tomography and EDX tomography into high-resolution 3D chemical mapping, (ii) geometric tomography and lattice-resolved backprojection into HREM-tomography for convex bodies, and (iii) geometric tomography and e-beam nanosculpting into “tomographic nanofabrication”.

Type
Research Article
Copyright
Copyright © Materials Research Society 2009

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References

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