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A Highly Sensitive Integrated a-Si:H Fluorescence Detector for Microfluidic Devices

Published online by Cambridge University Press:  01 February 2011

Toshihiro Kamei  and
Amane Shikanai
Toshihiro Kamei
Affiliation:
toshi-kamei@aist.go.jp, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan
Amane Shikanai
Affiliation:
a-shikanai@lab.fujikura.co.jp, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan
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Abstract

Most of micromachined and/or integrated fluorescence detectors suffer from high limit of detection (LOD) compared to conventional optical system that consists of discrete optical components, which is mainly due to higher laser light scattering of integrated optics rather than detector sensitivity. In this work, we have reduced background (BG) photocurrent of an integrated hydrogenated amorphous Si (a-Si:H) fluorescence detector due to laser light scattering by nearly one order magnitude, significantly improving a LOD. The detection platform comprises a microlens and the annular fluorescence detector where a thick SiO2/Ta2O5 multilayer optical interference filter (>6 μm) is monolithically integrated on an a-Si:H pin photodiode. With a microfluidic capillary electrophoresis (CE) device mounted on the platform, the system is demonstrated to separate DNA restriction fragment digests (LOD: 58 pg/μL) as well as 2 nM of fluorescein-labeled oligomer (LOD: 240 pM) with high speed, high sensitivity and high separation efficiency. The integrated a-Si:H fluorescence detector exhibits high sensitivity for practical fluorescent labeling dyes as well as feasibility of monolithic integration with a laser diode, making it ideal for application to point-of-care microfluidic biochemical analysis.

Keywords

amorphousbiomedicalplasma-enhanced CVD (PECVD) (deposition)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1245: Symposium A – Amorphous and Polycrystalline Thin-Film Silicon Science and Technology-2010 , 2010 , 1245-A08-01
Copyright
Copyright © Materials Research Society 2010

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