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Effect of Substrate Temperature on the Electrochromic Properties of Cobalt Hydroxide Thin Films Prepared by Reactive Sputtering

Published online by Cambridge University Press:  18 August 2011

KyoungMoo Lee ,
Yoshio Abe ,
Midori Kawamura  and
Hidenobu Itoh
KyoungMoo Lee
Affiliation:
Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, 090-8507, Japan
Yoshio Abe
Affiliation:
Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, 090-8507, Japan
Midori Kawamura
Affiliation:
Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, 090-8507, Japan
Hidenobu Itoh
Affiliation:
Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, 090-8507, Japan
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Abstract

Cobalt hydroxide thin films with a thickness of 100 nm were deposited onto glass, Si and indium tin oxide (ITO)-coated glass substrates by reactively sputtering a Co target in H2O gas. The substrate temperature was varied from -20 to +200°C. The EC performance of the films was investigated in 0.1 M KOH aqueous solution. X-ray diffraction (XRD) and Fourier transform infrared (FTIR) spectroscopy of the samples indicated that Co3O4 films were formed at substrate temperatures above 100°C, and amorphous CoOOH films were deposited in the range from 10 to -20°C. A large change in transmittance of approximately 26% and high EC coloration efficiency of 47 cm2/C were obtained at a wavelength of 600 nm for the CoOOH thin film deposited at -20°C. The good EC performance of the CoOOH films is attributed to the low film density and amorphous structure.

Keywords

Cosputteringthin film
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1328: Symposium H – Electrochromic Materials and Devices , 2011 , mrss11-1328-h03-05
Copyright
Copyright © Materials Research Society 2011

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References

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