Hostname: page-component-77c89778f8-vpsfw Total loading time: 0 Render date: 2024-07-25T01:53:18.731Z Has data issue: false hasContentIssue false
  • English
  • Français

Conformal deposition of a silicon-oxide and a fluorocarbon on a nano-shaped material in supercritical carbon dioxide

Published online by Cambridge University Press:  01 February 2011

Takashi Shimizu ,
Kenichi Ishii  and
Eiichi Suzuki
Takashi Shimizu
Affiliation:
t-shimizu@aist.go.jp, Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki, 3058568, Japan, +81-298-61-5410, +81-298-61-5170
Kenichi Ishii
Affiliation:
ken.ishii@aist.go.jp, Advanced Industrial Science and Technology, Japan
Eiichi Suzuki
Affiliation:
e.suzuki@aist.go.jp, Advanced Industrial Science and Technology, Japan
Get access

Abstract

A novel surface engineering of nano-shaped materials, i.e., surface coating in supercritical fluid is proposed. Conformal deposition of a silicon-oxide thin film in supercritical carbon dioxide (scCO2) where O2 gas is miscible as an oxidizing agent is demonstrated. A uniform silicon-oxide film has been deposited even on backside of a nano-shaped SiO2, which is hard in the standard chemical vapor deposition. Filling of a Si-oxide into the horizontal gap has also been successfully achieved. Deposition of a fluorocarbon in scCO2 were tried to investigate surface modification using scCO2 and a hydrophilic SiO2 surface became water-repellent after the surface modification. These results indicate that the developed surface engineering in the supercritical fluid is promising technology in nanoscale device fabrication and micro (nano-) electromechanical systems.

Keywords

coatingnanostructuremicroelectro-mechanical (MEMS)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 890: Symposium Y – Surface Engineering for Manufacturing Applications , 2005 , 0890-Y08-14
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Blackburn, J. M., Long, D. P., Cabanas, A., and Watkins, J. J., Science 294 141 (2001).Google Scholar
2. Smart, N. G., Carleson, T., Kast, T., Clifford, A. A., Burford, M. D., and Wai, C. M., Talanta 44, 137 (1997).Google Scholar
3. Dormans, G. J. M., Journal of Crystal Growth 108, 806 (1991).Google Scholar
4. Tetrakishexafluoroacetylacetonatozirconium.Google Scholar
5. Tetratertiarybutoxyzirconium.Google Scholar
6. Tetrakis[1-dimethylamino-2-propoxy]silane.Google Scholar
7. An amorphous, soluble perfluoropolymer purchased from Asahi Glass Co., Ltd.Google Scholar