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Characteristics of Laser-Ablated Plasma and Properties Of Diamond-Like Carbon Film In Pulsed Laser Deposition

Published online by Cambridge University Press:  17 March 2011

Yukihiko Yamagata ,
Tamiko Ohshima ,
Tomoaki Ikegami ,
Raj K. Thareja ,
Kenji Ebihara ,
Ajay Sharma ,
Robert M. Mayo  and
Jagdish Narayan
Yukihiko Yamagata
Affiliation:
Department of Electrical and Computer Engineering, Kumamoto University, Kurokami 2-39-1, Kumamoto 860-8555, JAPAN
Tamiko Ohshima
Affiliation:
Department of Electrical and Computer Engineering, Kumamoto University, Kurokami 2-39-1, Kumamoto 860-8555, JAPAN
Tomoaki Ikegami
Affiliation:
Department of Electrical and Computer Engineering, Kumamoto University, Kurokami 2-39-1, Kumamoto 860-8555, JAPAN
Raj K. Thareja
Affiliation:
Department of Electrical and Computer Engineering, Kumamoto University, Kurokami 2-39-1, Kumamoto 860-8555, JAPAN
Kenji Ebihara
Affiliation:
Department of Electrical and Computer Engineering, Kumamoto University, Kurokami 2-39-1, Kumamoto 860-8555, JAPAN
Ajay Sharma
Affiliation:
NSF Center of Advanced Materials and Smart Structures, North Carolina State University, Raleigh, NC 27695-7916, U.S.A
Robert M. Mayo
Affiliation:
Department of Nuclear Engineering, North Carolina State University, Raleigh, NC 27695-7909, U.S.A
Jagdish Narayan
Affiliation:
NSF Center of Advanced Materials and Smart Structures, North Carolina State University, Raleigh, NC 27695-7916, U.S.A
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Abstract

Characteristics of laser-ablated carbon plasma and properties of diamond-like carbon film in KrF pulsed laser deposition were investigated using laser-induced fluorescence (LIF) and optical emission spectroscopy. Two-dimensional LIF images of C2 (Swan band, d3Φg – a3Φu) and C3 (Comet Head System, A1Φu –X1Σg+) molecules were detected as a function of laser energy density by narrow band pass filters and an intensified CCD camera. C2 LIF intensity is found to be weaker in the central part of the plume than that at the periphery at incident energy greater than 6 J/cm2. It is conjectured that C2 molecules are dissociated by collision with energetic species in the central part of the ablation plume, and degrade the diamond-like property of deposited films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 648: Symposium P – Growth, Evolution & Properties of Surfaces, Thin Films, and Self Organized Structure , 2000 , P6.55
Copyright
Copyright © Materials Research Society 2001

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