Skip to main content Accessibility help
×
Home
Hostname: page-component-78bd46657c-r9wg7 Total loading time: 0.226 Render date: 2021-05-07T16:42:03.484Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false, "newCitedByModal": true }

Carbon Nanotube Micro-Opto-Mechanical Grippers

Published online by Cambridge University Press:  01 February 2011

Shaoxin Lu
Affiliation:
sxlu@udel.edu, University of Delaware, Department of Electrical and Computer Engineering, 140 Evans Hall,, University of Delaware, Newark, DE, 19716, United States
Ye Liu
Affiliation:
lyalex@udel.edu, University of Delaware, Department of Electrical and Computer Engineering, Newark, DE, 19716, United States
Ning Shao
Affiliation:
ningshao@udel.edu, University of Delaware, Department of Electrical and Computer Engineering, Newark, DE, 19716, United States
Balaji Panchapakesan
Affiliation:
Baloo@eecis.udel.edu, University of Delaware, Department of Electrical and Computer Engineering, Newark, DE, 19716, United States
Get access

Abstract

We report the integration of single wall carbon nanotube ensembles into micro-mechanical systems to realize a new carbon nanotube micro-optomechanical system (CNT-MOMS). CNT-MOM grippers were fabricated with CMOS compatible techniques involving nanotube film formation, wafer bonding, photo-lithography, plasma etching and dry release. MOM-grippers displacement of ∼24μm was obtained from a gripper of 430μm in length under infra-red laser stimulus and continuous operation of more than 100,000 cycles was acquired. The optical power consumption of the gripper operation was estimated to be as small as ∼240μW. This study is a good example of how nano-materials could be integrated into CMOS compatible techniques for applications in high performance MEMS and nanoscale actuation technologies.

Type
Research Article
Copyright
Copyright © Materials Research Society 2007

Access options

Get access to the full version of this content by using one of the access options below.

References

1. Poosanaas, P., Tonooka, K. and Uchino, K., Mechatronics 10, 467 (2000).CrossRefGoogle Scholar
2. Krecmer, P., Moulin, A. M., Stephenson, R. J., Rayment, T., Welland, M. E. and Elliott, S. R., Science 277, 1799 (1997).CrossRefGoogle Scholar
3. Lu, S. and Panchapakesan, B., Nanotechnology 16, 2548 (2005).CrossRefGoogle Scholar
4. Ahir, S. V. and Terentjev, E. M., Nature Mater. 4, 491 (2005).CrossRefGoogle Scholar
5. Ahir, S. V., Squires, A. M., Tajbakhsh, A. R. and Terentjev, E. M., Phys. Rev. B 73, 085420 (2006).CrossRefGoogle Scholar
6. Lu, S. and Panchapakesan, B., Appl. Phys. Lett. 88, 253107 (2006).CrossRefGoogle Scholar
7. Wu, Z. et al, Science 305, 1273 (2004).CrossRefGoogle Scholar
8. Chronis, N. and Lee, L. P., J. Microelectromech. Syst. 14, 857 (2005).CrossRefGoogle Scholar
9. Nguyen, N. T., Ho, S. S. and Low, C. L., J. Micromech. Microeng. 14, 969 (2004).CrossRefGoogle Scholar
10. Butefisch, S., Seidemann, V. and Buttgenbach, S., Sens. Actuators A 97–98, 638 (2002).CrossRefGoogle Scholar
11. Roch, I., Ph, B., Collard, D. and Buchaillot, L., J. Micromech. Microeng. 13, 330 (2003).CrossRefGoogle Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Carbon Nanotube Micro-Opto-Mechanical Grippers
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Carbon Nanotube Micro-Opto-Mechanical Grippers
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Carbon Nanotube Micro-Opto-Mechanical Grippers
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *