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Buried Amorphous Layer in Gallium Arsenide

Published online by Cambridge University Press:  25 February 2011

D. Sengupta ,
M.C. Ridgway ,
J.M. Zemanski  and
S.T. Johnson
D. Sengupta
Affiliation:
Microelectronics and Materials Technology Centre, Royal Melbourne Institute of Technology, Melbourne, Victoria, Australia
M.C. Ridgway
Affiliation:
Microelectronics and Materials Technology Centre, Royal Melbourne Institute of Technology, Melbourne, Victoria, Australia
J.M. Zemanski
Affiliation:
Microelectronics and Materials Technology Centre, Royal Melbourne Institute of Technology, Melbourne, Victoria, Australia
S.T. Johnson
Affiliation:
Microelectronics and Materials Technology Centre, Royal Melbourne Institute of Technology, Melbourne, Victoria, Australia
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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 163: Symposium G – Impurities, Defects and Diffusion in Semiconductors: Bulk and Layered Structures , 1989 , 975
Copyright
Copyright © Materials Research Society 1990

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References

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