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Analysis on interface layer between Pt electrode and ferroelectric layer of solution-processed PZT capacitor

Published online by Cambridge University Press:  12 July 2011

Thanh V Pham
Affiliation:
Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan.
Trinh N Q Bui
Affiliation:
Japan Science and Technology Agency, ERATO, Shimoda Nano-Liquid Process Project, 2-5-3 Asahidai, Nomi, Ishikawa 923-1211, Japan.
Tue T Phan
Affiliation:
Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan.
Takaaki Miyasako
Affiliation:
Japan Science and Technology Agency, ERATO, Shimoda Nano-Liquid Process Project, 2-5-3 Asahidai, Nomi, Ishikawa 923-1211, Japan.
Eisuke Tokumitsu
Affiliation:
Japan Science and Technology Agency, ERATO, Shimoda Nano-Liquid Process Project, 2-5-3 Asahidai, Nomi, Ishikawa 923-1211, Japan. Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259-R2-19 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan.
Tatsuya Shimoda
Affiliation:
Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan. Japan Science and Technology Agency, ERATO, Shimoda Nano-Liquid Process Project, 2-5-3 Asahidai, Nomi, Ishikawa 923-1211, Japan.
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Abstract

Pt/Pb(Zr0.4Ti0.6)O3 (PZT)/Pt capacitors were prepared by the sol-gel technique and their electric properties were analyzed. The asymmetry of polarization-electric field (P-E) and capacitor-voltage (C-V) curves exhibits existence of an interface layer (dead-layer) between top Pt electrode and PZT thin film. By conducting temperature dependant measurement, the Pt/PZT/Pt capacitor was confirmed to be Schottky emission conduction. In addition, barrier height of PZT contact calculated 0.67eV. On basic a series capacitors model and Schottky contact of Pt/PZT interface, the thickness and the dielectric constant of this dead-layer were estimated to be 6.4 nm and 170, respectively. Moreover, the dielectric constant of 900 was obtained for the real PZT ferroelectric layer. The existence of the dead-layer was also confirmed by the high resolution transmission electron microscopy (HR-TEM) observation and the energy dispersive X-ray (EDX) analysis on PZT ferroelectric layer in the Pt/PZT/Pt structure. Based on EDX analysis result, a 10-nm layer at Pt/PZT contact was suggested to be the dead-layer.

Type
Research Article
Copyright
Copyright © Materials Research Society 2011

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Analysis on interface layer between Pt electrode and ferroelectric layer of solution-processed PZT capacitor
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