Hostname: page-component-7479d7b7d-wxhwt Total loading time: 0 Render date: 2024-07-11T09:23:15.028Z Has data issue: false hasContentIssue false
  • English
  • Français

Advanced Ion Beam Material Processing Projects in Japan

Published online by Cambridge University Press:  25 February 2011

Isao Yamada
Isao Yamada*
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University Sakyo, Kyoto 606, Japan
Get access

Abstract

R&D projects of ion beam systems and ion beam process technology have been conducted under the National Research and Development Program known as the “Large-Scale project”. The project includes development of five large-scale ion beam systems and their application for surface modifications. Under another program called the National Research Facility Development Project, the Ion Engineering Center Corporation has been established in order to promote industrial applications of ion beam processes. This paper reviews those projects and recent progress on development of large-scale ion beam systems and related materials processing technology. Major research projects which have been funded by the Ministry of Education for ion beam related researches are also reviewed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 268: Symposium K – Materials Modification by Energetic Atoms and Ions , 1992 , 261
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Advanced Material-Processing and Machining Technology Research Association, Sumitomo Seimei Shin-Osaka Building South Wing 10F, 5-5-15 , Nishi-Nakajima, , Yodogawa-ku, Osaka 532 Japan.Google Scholar
2. Yamada, I. Nuc. Instr. Methods in Physics Res. B59/60 (1991) 1467.Google Scholar
3. Yamada, I., Surface and Coating Technology (1992), to be published.Google Scholar
4. Interim Evaluation Report on Advanced Material-Processing and Machining Technology by the Industrial Technology Council of the Ministry of International Trade and Industry, Japan., National Development Program Committee, Evaluation Subcommittee, and Interim Evaluation Working Group for Advanced Technology Project (Published in Japanese and English).Google Scholar
5.Association member: Nissin Electric Co., Ltd.Google Scholar
6.Association member: ULVAC Japan, Ltd.Google Scholar
7.Association member: Mitsubishi Electric Corp.Google Scholar
8. Yamada, I., Applied Surface Science, 43 (1989) 23.Google Scholar
9. Yamada, I., Palmstrøm, C.J., Kennedy, E., Mayer, J.W., Inokawa, H. and Takagi, T., in Layered Structures, Epitaxy, and Interfaces, edited by Gibson, J.M. and Dawson, L.R. (Mater. Res. Soc. Proc. 37, Pittsbrgh, PA 1985) pp. 401–406.Google Scholar
10. Yamada, I., Takaoka, G.H., Usui, H., Satoh, F., Itoh, Y., Yamashita, K., Kitamoto, S., Namba, Y., Hashimoto, Y., Maeyama, Y. and Machida, K., Nucl. Instr. Methods in Physics Res. B55 (1991) 876.Google Scholar
11. Kawagoe, Y., Yamanishi, K., Imada, K. and Sato, K., Nucl. Instr. Methods in Physics Res. B59/60 (1991) 1426.Google Scholar
12.Association member: JEOL Ltd.Google Scholar
13.Association member: Hitachi, Ltd.Google Scholar
14.Association member: Nippon Sheet Glass Co., Ltd.Google Scholar
15. Tagami, T., Oyoshi, K. and Tanaka, S., in Processing and Characterization of Materials Using Ion Beams, edited by Rehn, L.E., Green, J. and Smidt, F.A. (Mater. Res. Soc. Proc. 128 Pittsburgh, PA 1989) pp. 519–524.Google Scholar
16. Oyoshi, K., Tagami, T. and Tanaka, S., Nucl. Instr. Methods in Physics Res. B59/60 (1991) 1324.Google Scholar
17. Oyoshl, K., Tagami, T., and Tanaka, S., J.Appl. Phys. 68 (1990) 3653.Google Scholar
18.Association member: Kobe Steel, Ltd.Google Scholar
19.Association member: Japan Aviation Electronics Industries, Ltd.Google Scholar
20. Kataoka, I., Surface and coating technology (1992) to be published.Google Scholar
21.Ion Engineering Center Corporation, 4547-15 Tsuda, Hirakata, Osaka 573-01, Japan.Google Scholar
22. Yamada, I, Nucl. Instr. and Meth in Physics Res. B55 (1991) 544.Google Scholar
23. Yamada, I., Takaoka, G.H., Usui, H. and Koh, S.K., in Clusters and Cluster-Assembled Materials, edited by Averback, R.S., Bernholc, J, Nelson, D.L (Mater. Res. Soc. Proc. 206, Pittsburgh, PA 1991) pp.383–390.Google Scholar