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On the bending strength of single-crystal silicon theta-like specimens

Published online by Cambridge University Press:  30 May 2013

Rebecca Kirkpatrick ,
William A. Osborn ,
Michael S. Gaither ,
Richard S. Gates ,
Frank W. DelRio  and
Robert F. Cook
Rebecca Kirkpatrick
Affiliation:
Materials Measurement Science Division, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
William A. Osborn
Affiliation:
Materials Measurement Science Division, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Michael S. Gaither
Affiliation:
Materials Measurement Science Division, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Richard S. Gates
Affiliation:
Materials Measurement Science Division, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Frank W. DelRio
Affiliation:
Materials Measurement Science Division, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Robert F. Cook*
Affiliation:
Materials Measurement Science Division, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
*
Address all correspondence to Robert F. Cook atrobert.cook@nist.gov
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Abstract

A new theta geometry was developed for microscale bending strength measurements. This new “gap” theta specimen was a modification of the arch theta specimen that enabled microscale tensile testing. The gap theta specimen was demonstrated here on single-crystal silicon, microfabricated using two different etch processes. The resulting sample strengths were described by three-parameter Weibull distributions derived from parameters determined using established arch theta strengths, assuming a specimen-geometry and -size invariant flaw distribution and an approximate loading configuration.

Type
Research Letters
Information
MRS Communications , Volume 3 , Issue 2 , June 2013 , pp. 113 - 117
Copyright
Copyright © Materials Research Society 2013 

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