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Fabrication of Porous Metal Bonded Diamond Grinding Wheels for Flat-Surface Nanomachining

Published online by Cambridge University Press:  31 January 2011

Koji Matsumaru  and
Atsushi Takata
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Extract

The articles thus far in this MRS Bulletin issue on Emerging Methods for Micro- and Nanofabrication have addressed the creation of structures or devices on a small scale. What is implicit in some of these articles is that a substrate of sufficient flatness is available upon which to build these structures in a controlled way. A related area, therefore, is the formation of these flat surfaces, as well as the development of the tools to make them.

Type
Research Article
Information
MRS Bulletin , Volume 26 , Issue 7: Emerging Methods for Micro- and Nano-Fabrication Nanofabrication , July 2001 , pp. 544 - 546
Copyright
Copyright © Materials Research Society 2001

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