Hostname: page-component-77c89778f8-swr86 Total loading time: 0 Render date: 2024-07-20T21:40:10.007Z Has data issue: false hasContentIssue false
  • English
  • Français

Characterization of Transparent Conducting Oxides

Published online by Cambridge University Press:  31 January 2011

Timothy J. Coutts ,
David L. Young  and
Xiaonan Li
Get access

Extract

As the areas of the major applications of transparent conducting oxides (TCOs) increase, demand will grow for materials having lower sheet resistance while retaining good optical properties. Simply increasing the film thickness is not acceptable because this would increase the optical absorptance. New materials must be developed with lower resistivities than previously achieved and with optical properties superior to those of the present generation of TCOs. This has now been recognized internationally, and novel materials are being investigated in Japan and the United States.

Type
Research Article
Information
MRS Bulletin , Volume 25 , Issue 8: Transparent Conducting Oxides , August 2000 , pp. 58 - 65
Copyright
Copyright © Materials Research Society 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Hartnagel, H.L., Dawar, A.L., Jain, A.K., and Jagadish, C., Semiconducting Transparent Thin Films (Institute of Physics, London, 1995).Google Scholar
2.Kammler, D.R., Edwards, D.D., Ingram, B.J., Mason, T.O., Palmer, G.B., Ambrosini, A., and Poeppelmeier, K.R., Photovoltaics for the 21st Century, edited by V.K., Kapur, R.D., McConnel, D., Carlson, G.P., Ceasar, and A., Rohatgi (The Electrochemical Society, Proc. 99–11, Pennington, NJ, 1999) p. 68.Google Scholar
3.Hamberg, I. and Granqvist, C.G., J. Appl. Phys. 60 (11) (1986) p. R123.CrossRefGoogle Scholar
4.Chopra, K.L., Major, S., and Pandya, D.K., Thin Solid Films 102 (1) (1983) p. 1.CrossRefGoogle Scholar
5.Vossen, J.L., in Physics of Thin Films, edited by G., Haas, M.H., Francombe, and R.W., Hoffman (Academic Press, New York, 1977).Google Scholar
6.Jackson, J.D., Classical Electrodynamics (John Wiley & Sons, New York, 1975).Google Scholar
7.Drude, P., Ann. Phys. 3 (1900) p. 369.CrossRefGoogle Scholar
8.Ashcroft, N.W. and Mermin, N.D., Solid State Physics (Harcourt Brace College Publishers, Fort Worth, TX, 1976).Google Scholar
9.Pankove, J.I., Optical Processes in Semiconductors (Dover Publications, New York, 1971).Google Scholar
10.Li, X., Gessert, T.A., Sheldon, P., and Ribelin, R., J. Vac. Sci. Technol. (2000) in press.Google Scholar
11.Wyszecki, G., in Handbook of Optics, edited by W.G., Driscoll and W., Vaughan (McGraw-Hill, New York, 1978) p. 9.Google Scholar
12.Mulligan, W.P., “Study of the Fundamental Limits to Electron Mobility in Cadmium Stannate Thin Films,” PhD thesis, Colorado School of Mines, Department of Materials Science, 1997, p. 198.Google Scholar
13.Haacke, G., in Annual Review of Materials Science, Vol. 7, edited by R.A., Huggins, R.H., Bube, and R.W., Roberts (Annual Reviews, Palo Alto, CA, 1977) p. 73.Google Scholar
14.Haacke, G., Mealmaker, W.E., and Siegel, L.A., Thin Solid Films 55 (1978) p. 67.CrossRefGoogle Scholar
15.Burstein, L., Phys. Rev. 93 (1954) p. 632.CrossRefGoogle Scholar
16.Finkenrath, H., Köhler, H., and Lochmann, M., Z. Angew. Phys. 21 (1966) p. 512.Google Scholar
17.Finkenrath, H. and Uhle, N., Solid State Commun. 5 (1967) p. 875.CrossRefGoogle Scholar
18.Finkenrath, H. and Uhle, N., in Semiconductors: Physics of II-VI and I-VII Compounds, Semimagnetic Semiconductors—Landolt-Börnstein, Vol. III/17b, edited by O., Madelung, M., Schulz, and H., Weiss (Springer-Verlag, Berlin, 1982) p. 161.Google Scholar
19.Nozik, A.J., Phys. Rev. B 6 (1972) p. 453.CrossRefGoogle Scholar
20.Putley, E., The Hall Effect and Related Phenomena (Butterworths, London, 1960).Google Scholar
21.Kolodziejcak, J. and Zukotynski, S., Phys. Status Solidi 5 (1964) p. 145.CrossRefGoogle Scholar
22.Young, D.L., Coutts, T.J., Kaydanov, V.I., and Mulligan, W.P., J. Vac. Sci. Technol. A (2000) in press.Google Scholar
23.Zhitinskaya, M.K., Kaidanov, V.I., and Chernik, I.A., Sov. Phys. Solid State 8 (1966) p. 295.Google Scholar
24.Young, D.L., Coutts, T.J., and Kaydanov, V.I., Rev. Sci. Instrum. 71 (2) (Part 1) (2000) p. 462.CrossRefGoogle Scholar
25.Lide, D.R. and Frederikse, H.P.R., eds., CRC Handbook of Chemistry and Physics (CRC Press, Boca Raton, Fla., 1993–1994).Google Scholar
26.Joseph, M., Tabata, H., and Kawai, T., Jpn. J. Appl. Phys., Part 2: Lett. 38 (1999) p. L1205.CrossRefGoogle Scholar