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Ion-Beam Rocking Measurements of Small Lattice Strains

Published online by Cambridge University Press:  17 June 2015

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This article describes a new technique for nuclear microprobes that has been developed to produce angle-resolved channeling information from small areas of crystalline material without any rotation or translation of the sample. This “beam rocking” system, with a focused MeV ion beam, has been used to detect and quantify small interface rotation angles in strained Si1−xGex/Si samples with 0.015 < x ξ 0.175, as well as samples with graded germanium composition. By eliminating possible rotation errors caused by translation of the sample stage or backlash in the gears of a goniometer, smaller rotation angles can be measured than with standard ion-channeling analysis.

Channeling is frequently used in ion-beam analysis to characterize crystalline materials (see the previous article by King). If the crystal is positioned near axial or planar alignment and then tilted incrementally with respect to the beam, as the sample is brought into channeling alignment, the yield of interactions with the host lattice will be reduced as the ions become channeled, since they are less likely to interact closely with atomic nuclei. Angular scans can be used to measure strain in heteroepitaxial layers by measuring the rotation of off-normal axes using this process.

Type
Focused MeV Ion Beams for Materials Analysis and Microfabrication
Information
MRS Bulletin , Volume 25 , Issue 2: Focused MeV Ion Beams for Materials Analysis and Microfabrication , February 2000 , pp. 28 - 32
Copyright
Copyright © Materials Research Society 2000

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