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Room Temperature Fabrication of (ZnO)x(InN)1-x films with Step-Terrace Structure by RF Magnetron Sputtering

Published online by Cambridge University Press:  06 January 2016

Koichi Matsushima ,
Tomoaki Ide ,
Daisuke Yamashita ,
Hyunwoong Seo ,
Kazunori Koga ,
Masaharu Shiratani  and
Naho Itagaki
Koichi Matsushima*
Affiliation:
Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0385, Japan
Tomoaki Ide
Affiliation:
Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0385, Japan
Daisuke Yamashita
Affiliation:
Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0385, Japan
Hyunwoong Seo
Affiliation:
Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0385, Japan
Kazunori Koga
Affiliation:
Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0385, Japan
Masaharu Shiratani
Affiliation:
Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0385, Japan
Naho Itagaki
Affiliation:
Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0385, Japan
*
*(Email: k.matsushima@plasma.ed.kyushu-u.ac.jp)
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Abstract

We study effects of deposition temperature on growth mode and surface morphology of hetero-epitaxial (ZnO)x(InN)1-x (ZION) films on ZnO templates. ZION films deposited at low temperature of RT-250oC grow two dimensionally, whereas ZION films deposited at high temperature of 350-450oC grow three dimensionally. Growth mode is changed from two-dimensional growth mode to three-dimensional one, because the critical thickness where film strain begin to relax decreases with increasing the deposition temperature. At high deposition temperatures, the number of point defects in ZION films decreases because migration of adatoms on the growing surface is enhanced. The strain energy in ZION films increases with increasing the deposition temperature, since the strain energy is not released by point defects. Therefore, lattice relaxation for the higher deposition temperature begins at the smaller film thickness to release the strain energy. As a result, ZION films with atomically-flat surface were obtained even at RT.

Keywords

sputteringmorphologycrystal growth
Type
Articles
Information
MRS Advances , Volume 1 , Issue 2: Energy and Sustainability , 2016 , pp. 115 - 119
Copyright
Copyright © Materials Research Society 2016 

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References

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