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Influence of spray-pyrolysis deposition parameters on the electrical properties of aluminium zinc oxides thin films

Published online by Cambridge University Press:  30 January 2018

Denis E. Martins ,
Giovani Gozzi  and
Lucas Fugikawa Santos
Denis E. Martins
Affiliation:
Departamento de Física, Universidade Estadual Paulista - UNESP, Avenida 24A, 1515, CEP: 13500-970,Rio Claro, SP, Brazil.
Giovani Gozzi*
Affiliation:
Departamento de Física, Universidade Estadual Paulista - UNESP, Avenida 24A, 1515, CEP: 13500-970,Rio Claro, SP, Brazil.
Lucas Fugikawa Santos
Affiliation:
Departamento de Física, Universidade Estadual Paulista - UNESP, Avenida 24A, 1515, CEP: 13500-970,Rio Claro, SP, Brazil. Departamento de Física, Universidade Estadual Paulista - UNESP, Rua Cristovao Colombo 2265, CEP15054-000, São José do Rio Preto, SP, Brazil.
*
*(Email: giovanigozzi@rc.unesp.br)
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Abstract

In the current work, we evaluate the influence of the processing parameters on the electrical properties of aluminium zinc oxide (AZO) thin films produced by airbrush spray-pyrolysis deposition technique. Spray-deposited AZO thin-films were produced with Al:Zn molar ratios varying from 0 % (pure ZnO) up to 30 %, using aluminium acetate and zinc acetate as organic precursors and water as solvent. Thermogravimetric analysis (TGA) and infrared spectroscopy (FTIR-ATR) were used to monitor the metal-oxide formation from the organic precursors as a function of the temperature. The results show that a temperature of 400 °C is necessary to completely degrade the organic phase and to obtain the desired inorganic metal-oxides films. The electrical properties of the TMOs were evaluated by d.c. current-voltage (I-V) analysis using planar thermally evaporated Al electrodes on top of the TMO layer, with different aspect ratios (1/18, 2/9, 5/13, 5/9 and 8/9). The lowest sheet resistance was obtained for AZO films at a molar Al concentration of 5 %. We also observed that, after carrying out a post-annealing treatment (30 mbar, 150 °C) the samples presented a decrease on the sheet resistance superior to 60 %, in comparison to the samples before the treatment.

Keywords

oxidethin filmspray pyrolysis
Type
Articles
Information
MRS Advances , Volume 3 , Issue 5: Electronics, Magnetics and Photonics , 2018 , pp. 283 - 289
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Copyright
Copyright © Materials Research Society 2018 

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References

REFERENCES:

Brilis, N., Romesis, P., Tsamakis, D., and Kompitsas, M., Superlattices Microstruct., 283– 290 (2005). DOI:10.1016/j.spmi.2005.08.003 CrossRefGoogle Scholar
Song, D., Widenborg, P., Chin, W. and Aberle, A. G., Sol. Energy Mater. Sol. Cells.,73, 1,1– 20 (2002). DOI:10.1016/S0927-0248(01)00104-0 CrossRefGoogle Scholar
Perednis, D. and Gauckler, L. J., Journal of Electroceramics 14, 103–111 ( 2005)Google Scholar
Carr, O., Gozzi, G., Santos, L. F., Faria, R. M. and Chinaglia, D. L., Transl. Mater. Res., 2, 1, 015002 (2015). DOI: 10.1088/2053-1613/2/1/015002 Google Scholar
Mesaros, A., Anal, J.. Appl. Pyrolysis,104, 653–659 (2013). DOI: 10.1016/j.jaap.2013.05.001 Google Scholar
Nielsen, G. F., Silva, L. H. F., Cruz, N. C. and Rangel, E. C., Surf. Interface Anal.,45, 7, 1113–1118 (2013). DOI:10.1002/sia.5236 CrossRefGoogle Scholar
Lin, C. C. and Li, Y. Y., Mater. Chem. Phys.,113,1,334–337 (2009). DOI: 10.1016/j.matchemphys.2008.07.070 Google Scholar
Villanueva, R., Gómez, A., Burguete, P., Martínez, E., Beltrán, A., Sapiña, F., Vicent, M. and Sánchez, E., J. Am. Ceram. Soc., 94, 1, 236–243 (2011). DOI:10.1111/j.1551-2916.2010.04021.x Google Scholar
Lokhande, B. J., Patil, P. S. and Uplane, M. D., Mater. Lett., 57, 3, 573–579 (2002). DOI:10.1016/S0167-577X(02)00832-7 Google Scholar
Prasada Rao, T. and Santhoshkumar, M. C., Appl. Surf. Sci., 255, 8, 4579–4584 (2009). DOI:10.1016/j.apsusc.2008.11.079 CrossRefGoogle Scholar
Seeber, W. T., Abou-Helal, M. O., Barth, S., Beil, D., Höche, T., Afify, H. H. and Demian, S. E., Mater. Sci. Semicond. Process. 2, 45 (1999). DOI: 10.1016/S1369-8001(99)00007-4 Google Scholar
Lu, J. G., Fujita, S., Kawaharamura, T., Nishinaka, H., Kamada, Y., Ohshima, T., Ye, Z. Z., Zeng, Y.J., Zhang, Y.Z., Zhu, L.P., He, H.P. and Zhao, B.H., J. Appl. Phys.,101, 8 (2007). DOI: 10.1063/1.2721374 Google Scholar
Natsume, Y. and Sakata, H., Thin Solid Films, 372,1,30–36 (2000). DOI: 10.1016/S0040-6090(00)01056-7 Google Scholar