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The Scanning Confocal Electron Microscope

Published online by Cambridge University Press:  14 March 2018

Nestor J. Zaluzec
Nestor J. Zaluzec*
Affiliation:
Argonne National Laboratory
*
Zaluzec@aaem.amc.anl.gov

Extract

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Imaging of sub-micron , sub-surface features of thick optically dense materials at high resolution has always been a difficult and/or time consuming task in materials research. For the most part this role has been relegated to technologically complex and expensive instrumentation having highly penetrating radiation, such as the synchrotron- based Scanning Transmission X-ray Microscope (STXM) or involves the careful preparation of thin cross-section slices for study using the Transmission/Scanning Transmission Electron Microscope (TEM/STEM).

Type
Research Article
Information
Microscopy Today , Volume 11 , Issue 6 , December 2003 , pp. 8 - 13
Copyright
Copyright © Microscopy Society of America 2003

References

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Zaluzec, N.J. “The ANL Advanced Analytical Electron Microscope” in Micro- Beam Analysis-1991, San Francisco Press, 1991, Ed. D, Howitt.Google Scholar
Zaluzec, N.J., US Patents #6, 548, 310-0 (2003). This work has been supported by the US DoE at ANL under contract #BES-MS W-31-109-Eng-38.Google Scholar