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Practical Issues for Quantitative X-ray Microanalysis in SEM at Low kV

Published online by Cambridge University Press:  14 March 2018

Peter Statham
Peter Statham*
Affiliation:
Oxford Instruments Analytical Limited, High Wycombe, Bucks U.K.
*
Peter.STATHAM@oxinst.co.uk

Extract

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In the three decades following Castaing's seminal thesis [1] x-ray analysis received widespread attention from research groups. By 1980, the methods and correction procedures for quantitative analysis of elements with atomic number 11 and above, using accelerating voltages between 15kV and 25kV, were well established and available in commercial instrumentation. At the time, scanning electron microscopes (SEMs) could rarely deliver high and stable beam current at much lower kV, and x-ray spectrometers had poor efficiency below lkeV so that low kV analysis received comparatively little attention.

Type
Research Article
Information
Microscopy Today , Volume 14 , Issue 1 , January 2006 , pp. 30 - 33
Copyright
Copyright © Microscopy Society of America 2006

References

[1]. Castaing, R., Thesis, Univ. of Paris, Paris, France (1951)Google Scholar
[2] Myklebust, R.L., Fiori, C.E. and Newbury, D.E., Microbeam Analysis-1990 (1990), 147 Google Scholar
[3] Duncumb, and Statham, P.J., “Benefits of x-ray spectrum simulation at low energies”, Microchimica Acta, 2002, 138, 249–258 Google Scholar
[4] Statham, P.J. “A check total for validating standardless and normalised edx analysis at low kV” Microchimica Acta, 145,229–235 (2004).Google Scholar