Hostname: page-component-848d4c4894-2xdlg Total loading time: 0 Render date: 2024-06-22T05:34:11.200Z Has data issue: false hasContentIssue false
  • English
  • Français

New Developments in Gemini® Fesem Technology

Published online by Cambridge University Press:  14 March 2018

H. Jaksch  and
J-P Vermeulen
H. Jaksch
Affiliation:
Carl Zeiss SMT Oberkochen, Germany
J-P Vermeulen*
Affiliation:
Carl Zeiss SMT Oberkochen, Germany
*
vermeulen@smt.zeiss.com

Extract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

The Field Emission SEM was introduced to improve imaging resolution available with conventional SEMs with a tungsten source. Thermal assisted or Schottky Field Emission SEMs were introduced in s the nineties by a number of companies as a stable source to overcome the beam instability of the cold FESEMs introduced earlier. The Gemini® based Field Emission SEM launched by Zeiss 12 years ago has been designed from the beginning as a high stability FESEM with a relatively large multi-ported chamber. The drive to develop Gemini® technology was the need for a FESEM capable of ultra-high resolution performance over the entire accelerating voltage range that also possessed the flexibility needed for a wide range of analytical applications.

Type
Research Article
Information
Microscopy Today , Volume 13 , Issue 2 , March 2005 , pp. 8 - 11
Copyright
Copyright © Microscopy Society of America 2005

References

Jaksch, H, Materials World, Oct. 1996 Google Scholar
Gnauck, P ,SEM 2000, Goeteborg 17 - 19 Oct 2000Google Scholar
Steigerwald, M.D.G., Imaging & Microscopy 4.03 (2003) 46Google Scholar