Computer Microvision is a microscopy technique originally developed to study sound-induced motions of sensory cells in the inner ear - motions that are on the order of picometers-i.e., smaller than the radius of a hydrogen atom. Three-dimensional micrornovies of inner ear cells moving in response to sound were analyzed to quantify motions with nanometer precision. Recently we have adapted the technique for in situ measurement of motions of micro-electron mechanical (MEMS) devices.

In Computer Microvision systems, images of MEMS are magnified with an optical microscope and projected onto a CCD camera. Stroboscopic illumination is used to obtain stopaction images of the moving structures. Stop-action images from multiple focal planes provide information about 3D structure and 3D motion. Image analysis algorithms determine motions of all visible structures with nanometer accuracy. The system can measure motions at frequencies as high as 5 MHz with nanometer resolution, i.e., well below the wavelength of light.