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You Do What in Your Microprobe?! The EPMA as a Multimode Platform for Nitride Semiconductor Characterization

Published online by Cambridge University Press:  01 August 2018

Paul R. Edwards ,
G. Naresh-Kumar ,
Gunnar Kusch ,
Jochen Bruckbauer ,
Lucia Spasevski ,
Catherine G. Brasser ,
Michael J. Wallace ,
Carol Trager-Cowan  and
Robert W. Martin
Paul R. Edwards
Affiliation:
Department of Physics, SUPA, University of Strathclyde, Glasgow, United Kingdom
G. Naresh-Kumar
Affiliation:
Department of Physics, SUPA, University of Strathclyde, Glasgow, United Kingdom
Gunnar Kusch
Affiliation:
Department of Physics, SUPA, University of Strathclyde, Glasgow, United Kingdom
Jochen Bruckbauer
Affiliation:
Department of Physics, SUPA, University of Strathclyde, Glasgow, United Kingdom
Lucia Spasevski
Affiliation:
Department of Physics, SUPA, University of Strathclyde, Glasgow, United Kingdom
Catherine G. Brasser
Affiliation:
Department of Physics, SUPA, University of Strathclyde, Glasgow, United Kingdom
Michael J. Wallace
Affiliation:
Department of Physics, SUPA, University of Strathclyde, Glasgow, United Kingdom
Carol Trager-Cowan
Affiliation:
Department of Physics, SUPA, University of Strathclyde, Glasgow, United Kingdom
Robert W. Martin
Affiliation:
Department of Physics, SUPA, University of Strathclyde, Glasgow, United Kingdom

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 2026 - 2027
Copyright
© Microscopy Society of America 2018 

References

References:

[1] Wallace, M. J., et al, Journal of Applied Physics 116 2014) p. 033105.Google Scholar
[2] Naresh-Kumar, G., et al, Materials Science in Semiconductor Processing 47 2016) p. 44.Google Scholar
[3] Kusch, G., et al, Applied Physics Letters 104 2014) p. 092114.Google Scholar
[4] The authors thank Prof. P. Parbrook of the Tydall National Institute and Prof. T. Wang of the University of Sheffield for providing samples. Funding is acknowledged from the UK EPSRC through grants EP/M015181/1, EP/P02744X/1 and EP/P015719/1.Google Scholar