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XTEM Study of the Microstructure of PZT Thin Films

Published online by Cambridge University Press:  02 July 2020

S. X. Wang ,
L. M. Wang  and
C. L. Lin
S. X. Wang
Affiliation:
Department of Nuclear Engineering & Radiological Sciences, University of Michigan, Ann Arbor, MI, 48109, USA
L. M. Wang
Affiliation:
Department of Nuclear Engineering & Radiological Sciences, University of Michigan, Ann Arbor, MI, 48109, USA
C. L. Lin
Affiliation:
National Laboratory of Functional Materials for Informatics, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai, 200050, People's Republic of China.
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Extract

Lead zirconate titanate (PbZrxTil-xO3, PZT) is one of the important ferroelectric materials for the storage elements of high-speed non-volatile memories. It also has much potential to be used in pyroelectric sensor, ultrasonic motor, and multiplayer ceramic capacitor.

PZT (Zr/Ti = 48/52) thin films were prepared using a metal-organic decomposition (MOD) process. The precursor solution used for PZT thin film preparation was based on lead acetate trihydrate, Pb(CH3COO)2; zirconium nitrate, Zr(NO3)4.5H2O; and titanium nbutoxide, Ti(nC2H9)4. 2-butoxyethanol was chosen as a solvent. A 30% excess Pb was added to the precursor to compensate for the loss of lead oxide during the annealing process. Acetic acid was used as a complexing agent for PZT solution to control the hydrolysis and condensation rates. The 0.3M precursor solution was spin-coated on the Pt(111)/Ti/SiO2/Si substrates for 20s at 3000 rpm. The deposited film was fired at 450 °C for 10 min and repeated five times to burn out the organics. The films were crystallized at 600 °C in air for 1 hr.

Type
Films and Coatings
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 458 - 459
Copyright
Copyright © Microscopy Society of America

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References

References:

1.Scott, J. F., Paz, C. A., Araujo, , Science 246 (1989) 1400.CrossRefGoogle Scholar
2.Zeng, J. M., Song, S. G., Wang, L. W., Zhang, M., Zheng, L. R. and Lin, C. L., J. Am. Ceram. Soc. 82(1999)461.CrossRefGoogle Scholar
3. The TEM work was performed at the Electron Microbeam Analysis Laboratory at the University of Michigan.Google Scholar