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Wide Range Image-shift Functions in SEM for Probing Applications

Published online by Cambridge University Press:  01 August 2005

T Agemura ,
M Sato ,
T Mizuno ,
H Yanagita  and
F Yano
T Agemura
Affiliation:
Hitachi High-Technologies Corporation, Japan
M Sato
Affiliation:
Hitachi High-Technologies Corporation, Japan
T Mizuno
Affiliation:
Renesas Technology Corporation, Japan
H Yanagita
Affiliation:
Renesas Technology Corporation, Japan
F Yano
Affiliation:
Renesas Technology Corporation, Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 750 - 751
Copyright
© 2005 Microscopy Society of America