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Wafer-Scale Ion Beam Lithography of Nanopore Devices

Published online by Cambridge University Press:  09 October 2013

J. Klingfus ,
A. Nadzeyka ,
S. Bauerdick ,
T. Albrecht  and
J.B. Edel
J. Klingfus
Affiliation:
A. Nadzeyka
Affiliation:
S. Bauerdick
Affiliation:
T. Albrecht
Affiliation:
J.B. Edel
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 912 - 913
Copyright
Copyright © Microscopy Society of America 2013