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Viability of Point Spread Function Deconvolution for SEM

Published online by Cambridge University Press:  04 August 2017

Mandy C. Nevins ,
Richard K. Hailstone ,
Matthew D. Zotta  and
Eric Lifshin
Mandy C. Nevins
Affiliation:
Center for Imaging Science, Rochester Institute of Technology, Rochester, NY.
Richard K. Hailstone
Affiliation:
Center for Imaging Science, Rochester Institute of Technology, Rochester, NY.
Matthew D. Zotta
Affiliation:
Nanojehm, Albany, NY.
Eric Lifshin
Affiliation:
SUNY Polytechnic Institute, Albany, NY.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 126 - 127
Copyright
© Microscopy Society of America 2017 

References

[1] Lifshin, E., et al, Microsc. Microanal 20 2014). p. 386.Google Scholar
[2] The authors acknowledge Nanojehm for the Aura Workstation beta unit on loan.Google Scholar