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UV Treatment of TEM/STEM Samples for Reduced Hydrocarbon Contamination

Published online by Cambridge University Press:  09 April 2017

D Hoyle
Affiliation:
Hitachi High-Technologies Canada, Inc, Etobicoke, Canada
M Malac
Affiliation:
National Institute of Nanotechnology, Alberta, Canada
M Trudeau
Affiliation:
IREQ, Quebec, Canada
P Woo
Affiliation:
Hitachi High-Technologies Canada, Inc, Etobicoke, Canada

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2011