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Using FIB-SEM as a Platform for the Positioning and Correlated Characterization of III-V Nanowires

Published online by Cambridge University Press:  01 August 2018

Aleksander B. Mosberg ,
Dingding Ren ,
Vidar T. Fauske ,
Bjorn Ove Fimland  and
Antonius T. J. van Helvoort
Aleksander B. Mosberg
Affiliation:
Department of Physics and
Dingding Ren
Affiliation:
Department of Electronic Systems, Norwegian University of Science and Technology (NTNU), Trondheim, Norway
Vidar T. Fauske
Affiliation:
Department of Physics and
Bjorn Ove Fimland
Affiliation:
Department of Electronic Systems, Norwegian University of Science and Technology (NTNU), Trondheim, Norway
Antonius T. J. van Helvoort
Affiliation:
Department of Physics and

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 806 - 807
Copyright
© Microscopy Society of America 2018 

References

[1] Yao, N (ed.) Focused Ion Beamp. Systems: Basics and Applications. C.U. Press Cambridge.Google Scholar
[2] Yan, R, et al, Nature Photonics 3 2009) p. 569–576.Google Scholar
[3] Ren, D, et al, Applied Physics Letters 109 2016) p. 243102.Google Scholar
[4] Mosberg, A B, et al, J. Phys.: Conf. Ser. 902 2017) p. 012020.Google Scholar
[5] Kim, C-S, et al, Vacuum 86 2012) p. 1014–1035.Google Scholar
[6] Fauske, V T, et al, J. Phys.: Conf. Ser. 522 2014) p. 012080.Google Scholar
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[8] NTNU and the Research Council of Norway are acknowledged for financial support via the initiative Enabling technologies: Nanotechnology, as well as to NorFab, (project number 245963/F50), NORTEM (grant 197405) and FRINATEK (grant 214235).Google Scholar