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Using DTSA-II Tools for Electron-Excited X-ray Microanalysis of Thin Films

Published online by Cambridge University Press:  30 July 2021

Dale Newbury ,
Nicholas Ritchie ,
Charles Tarrio  and
Robert Berg
Dale Newbury
Affiliation:
National Institute of Standards and Technology, Gaithersburg, Maryland, United States
Nicholas Ritchie
Affiliation:
National Institute of Standards & Technology, Gaithersburg, Maryland, United States
Charles Tarrio
Affiliation:
National Institute of Standards & Technology, Gaithersburg, Maryland, United States
Robert Berg
Affiliation:
National Institute of Standards & Technology, Gaithersburg, Maryland, United States

Abstract

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Type
Unresolved Challenges in Quantitative X-ray Microanalysis
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 1106 - 1107
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Goldstein, J., Newbury, D., Michael, J., Ritchie, N., Scott, J., and Joy, D., Scanning Electron Microscopy and X-ray Microanalysis, 4th ed. (Springer, New York, 2018).CrossRefGoogle Scholar
Ritchie, N. (2018). NIST DTSA-II software, including tutorials. Available for free at: http://www.cstl.nist.gov/div837/837.02/epq/dtsa2/index.html (retrieved December 21, 2020).Google Scholar