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Use of Sample Bias Voltage for Low-Energy High-Resolution Imaging in the SEM

Published online by Cambridge University Press:  01 August 2010

JR Michael ,
DC Joy  and
BJ Griffin
JR Michael
Affiliation:
Sandia National Laboratories
DC Joy
Affiliation:
Oak Ridge National Laboratory
BJ Griffin
Affiliation:
The University of Western Australia, Australia

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 614 - 615
Copyright
Copyright © Microscopy Society of America 2010