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Understanding Electron-Beam-Induced Deposition and Etching via a Monte - Carlo Based, 3D Growth Simulation with Gas Dynamics

Published online by Cambridge University Press:  05 August 2007

P Rack ,
D Smith  and
J Fowlkes
P Rack
Affiliation:
University of Tennessee,Knoxville
D Smith
Affiliation:
University of Tennessee,Knoxville
J Fowlkes
Affiliation:
University of Tennessee,Knoxville
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 1468 - 1469
Copyright
© 2007 Microscopy Society of America

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